Cover of Capacitive Silicon Resonators: Performance Enhancement Methods by Van Toan, Nguyen, Ono, Takahito, ISBN 9780367217761
Circuits

Capacitive Silicon Resonators: Performance Enhancement Methods

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Hardback Β· ISBN 9780367217761

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Key Specifications

ISBN 9780367217761
Publisher CRC Press
Publication date June 2019
Language English
MRP Β£145.99 GBP
Page count 178
Item weight 95 g

Recent progress in performance enhancement methods for capacitive silicon resonator will be outlined in this work. Several technological approaches including hermetic packaging based on the LTCC substrate, deep reactive ion etching, neutral beam etching technology, and metal-assisted chemical etching, will be discussed.