Cover of Plasma Processes for Semiconductor Fabrication by Hitchon, W. N. G., Ahmad, Haroon, Pepper, Michael, ISBN 9780521018005
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Plasma Processes for Semiconductor Fabrication

PLASMA PROCESSES FOR SEMICONDU

Contributor(s): Author , Editor , Editor Format: Paperback

Paperback · ISBN 9780521018005

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Key Specifications

ISBN 9780521018005
Subtitle PLASMA PROCESSES FOR SEMICONDU
Publisher Cambridge University Press
Publication date September 2005
Language English
MRP £76.00 GBP
Page count 232
Item weight 91 g

Plasma Processes for Semiconductor Fabrication published by Cambridge University Press.