Cover of Plasma Processes for Semiconductor Fabrication by Hitchon, W. Nicholas G., Ahmad, Haroon, Pepper, Michael, ISBN 9780521591751
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Plasma Processes for Semiconductor Fabrication

PLASMA PROCESSES FOR SEMICONDU

Contributor(s): Author , Editor , Editor Format: Hardback

Hardback · ISBN 9780521591751

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Key Specifications

ISBN 9780521591751
Subtitle PLASMA PROCESSES FOR SEMICONDU
Publisher Cambridge University Press
Publication date April 1999
Language English
MRP £131.00 GBP
Page count 232
Item weight 137 g

Plasma Processes for Semiconductor Fabrication published by Cambridge University Press.