Circuits

Silicon Micromachining

Name: Silicon Micromachining
Brand: Cambridge University Press
SKU: 9780521607674
Price: 10075.00 INR
Availability: InStock
ISBN: 9780521607674

SILICON MICROMACHINING REV/E

Contributor(s): Elwenspoek, Miko Author , Jansen, Henri V. Author , Elwenspoek, M. Author Format: Paperback

Paperback · ISBN 9780521607674

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Key Specifications

ISBN	9780521607674
Subtitle	SILICON MICROMACHINING REV/E
Publisher	Cambridge University Press
Publication date	August 2004
Language	English
MRP	£71.00 GBP
Page count	420
Item weight	165 g

This comprehensive book provides an overview of the key techniques used in the fabrication of micron-scale structures in silicon. Recent advances in these techniques have made it possible to create a new generation of microsystem devices, such as microsensors, accelerometers, micropumps, and miniature robots. The authors underpin the discussion of each technique with a brief review of the fundamental physical and chemical principles involved. They pay particular attention to methods such as isotropic and anisotropic wet chemical etching, wafer bonding, reactive ion etching, and surface micromachining. There is a special section on bulk micromachining, and the authors also discuss release mechanisms for movable microstructures. The book is a blend of detailed experimental and theoretical material, and will be of great interest to graduate students and researchers in electrical engineering and materials science whose work involves the study of micro-electromechanical systems (MEMS).

Silicon Micromachining

Key Specifications

Elwenspoek, Miko Author

Jansen, Henri V. Author

Elwenspoek, M. Author

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