Cover of Materials & Process Integration for MEMS by Tay, Francis E. H., ISBN 9781402071751
Electrical

Materials & Process Integration for MEMS

MATERIALS & PROCESS INTEGRATIO

Contributor(s): Editor Format: Hardback

Hardback ยท ISBN 9781402071751

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Key Specifications

ISBN 9781402071751
Subtitle MATERIALS & PROCESS INTEGRATIO
Publisher Springer
Publication date August 2002
Language English
MRP ยฃ129.99 GBP
Page count 328
Item weight 140 g

Materials & Process Integration for MEMS published by Springer.