Cover of Shape and Functional Elements of the Bulk Silicon Microtechnique : A Manual of Wet-Etched Silicon Structures by Frühauf, Joachim, ISBN 9783540221098
Chemistry

Shape and Functional Elements of the Bulk Silicon Microtechnique : A Manual of Wet-Etched Silicon Structures

SHAPE & FUNCTIONAL ELEMENTS OF

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Hardback · ISBN 9783540221098

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Key Specifications

ISBN 9783540221098
Subtitle SHAPE & FUNCTIONAL ELEMENTS OF
Publisher Springer
Publication date October 2004
Language English
MRP £89.99 GBP
Page count 242
Item weight 114 g

Shape and Functional Elements of the Bulk Silicon Microtechnique : A Manual of Wet-Etched Silicon Structures published by Springer.